Integrated heterodyne interferometer with on-chip modulators and detectors.

Area of Science:

• Integrated photonics
• Nanotechnology
• Metrology

Background:

• Heterodyne interferometers are crucial for precise measurements but are often bulky.
• Miniaturization of interferometric systems is essential for broader applications.

Purpose of the Study:

• To develop the first on-chip heterodyne interferometer on a 300-mm CMOS compatible process.
• To demonstrate a compact and highly sensitive interferometric system.

Main Methods:

• Fabrication of a 1 mm by 6 mm heterodyne interferometer using a 300-mm CMOS compatible process.
• Characterization of the interferometer's performance, focusing on displacement measurement.

Main Results:

• Achieved root-mean-square (RMS) position noise on the order of 2 nm.
• Demonstrated the smallest heterodyne interferometer to date.
• Preliminary results showcasing the displacement measurement mode.

Conclusions:

• The developed on-chip interferometer represents a significant advancement in miniaturized metrology.
• Its small size and high precision open possibilities for diverse applications including LIDAR and velocimetry.
• Further development can enhance its capabilities for advanced imaging and spectroscopy.