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Updated: Apr 6, 2026

Comprehensive Characterization of Extended Defects in Semiconductor Materials by a Scanning Electron Microscope
Published on: May 28, 2016
Dominant structural defects in amorphous silicon.
Paule Dagenais1, Laurent J Lewis, Sjoerd Roorda
1Département de Physique et Regroupement Québécois sur les Matériaux de Pointe (RQMP), Université de Montréal, C.P. 6128, Succursale Centre-Ville, Montréal, QC H3C 3J7, Canada.
Disorder in amorphous silicon (a-Si) arises from clustered pentacoordinated atoms, a dominant defect. Tricoordinated sites are sparser and more isolated, with defect energies estimated.
Area of Science:
- Materials Science
- Condensed Matter Physics
- Computational Materials Science
Background:
- Amorphous silicon (a-Si) is a crucial material in electronics.
- Understanding its structural disorder is key to optimizing its properties.
- Coordination defects significantly influence a-Si's electronic and physical behavior.
Purpose of the Study:
- To investigate the nature of disorder in amorphous silicon.
- To analyze the spatial arrangement and energies of coordination defects.
- To understand the impact of atomic implantation and relaxation on these defects.
Main Methods:
- Numerical modeling of amorphous silicon structures.
- Analysis of spatial correlations between structural defects using a bond-sharing parameter.
- Calculation of partial bond angle distributions for local geometries.
- Molecular-dynamics simulations of high-energy atom implantation and relaxation.
Main Results:
- Pentacoordinated atoms are identified as the dominant coordination defects in a-Si.
- These pentacoordinated defects exhibit a clustering tendency, with 17% linked via three-membered rings.
- Tricoordinated sites are less frequent and tend to be spatially separated.
- Formation energies of structural defects were estimated.
- The effect of relaxation on defect environments after atomic implantation was simulated.
Conclusions:
- The clustering of pentacoordinated atoms is a primary source of disorder in amorphous silicon.
- The spatial distribution and local geometries of defects provide insights into the material's structure.
- Simulations reveal how energetic events and relaxation influence defect evolution in a-Si.
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