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Published on: November 15, 2013
Coherently Strained Si-SixGe1-x Core-Shell Nanowire Heterostructures
David C Dillen1, Feng Wen1, Kyounghwan Kim1
1Microelectronics Research Center, The University of Texas at Austin , 10100 Burnet Road, Bldg. 160, Austin, Texas 78758, United States.
Epitaxial silicon-silicon germanium core-shell nanowires were grown and characterized. These strained nanowires demonstrate potential for use in n-type field-effect transistors.
Area of Science:
- Materials Science
- Nanotechnology
- Semiconductor Physics
Background:
- Silicon-germanium (SiGe) alloys are crucial in semiconductor technology.
- Core-shell nanowires offer unique quantum confinement properties.
- Strain engineering in SiGe heterostructures can tune electronic properties.
Purpose of the Study:
- To grow epitaxial, coherently strained Si-SiGe core-shell nanowires.
- To characterize the strain and vibrational properties of these heterostructures.
- To demonstrate the application of these nanowires in field-effect transistors.
Main Methods:
- Vapor-liquid-solid (VLS) growth for Si core.
- In situ ultrahigh vacuum chemical vapor deposition (UHV-CVD) for SiGe shell growth.
- Raman spectroscopy for vibrational mode analysis.
- Finite-element continuum elasticity and lattice dynamic theory for strain calculation.
Main Results:
- Successful growth of epitaxial, coherently strained Si-SiGe core-shell nanowires.
- Raman spectra confirmed Si-Si, Si-Ge, and Ge-Ge vibrational modes in the shell.
- Observed red-shift in the Si core's Si-Si mode due to tensile strain, matching theoretical predictions.
- Demonstrated n-type field-effect transistors utilizing these core-shell nanowires.
Conclusions:
- Coherently strained Si-SiGe core-shell nanowires can be fabricated using VLS and UHV-CVD.
- Tensile strain in the Si core significantly impacts its vibrational properties.
- These strained nanowires are viable channel materials for n-type field-effect transistors.
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