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Step beyond Kohler illumination analysis for far-field quantitative imaging: angular illumination asymmetry (ANILAS)
Optics Express
|November 10, 2016
Summary
Angular Illumination Asymmetry (ANILAS) distorts optical images and measurements. This study details a method to map ANILAS, aiding in correcting illumination issues for precise far-field optical imaging applications.
Area of Science:
- Optical Imaging
- Metrology
- Lithography
Background:
- Far-field optical imaging requires uniform illumination and minimal Angular Illumination Asymmetry (ANILAS).
- ANILAS, caused by aberrations and misalignment, leads to distorted images and inaccurate quantitative measurements.
Purpose of the Study:
- To present a detailed procedure for measuring and mapping ANILAS across the field-of-view (FOV).
- To visualize illumination states and identify ANILAS types and magnitudes before correction.
Main Methods:
- Developed a procedure to measure ANILAS across the FOV.
- Intentionally introduced illumination distortions to generate corresponding ANILAS maps.
Main Results:
- Created ANILAS maps for visualizing illumination uniformity and asymmetry.
- Demonstrated the ability to evaluate illumination beyond the Kohler criterion.
Conclusions:
- ANILAS mapping is crucial for quantitative optical imaging, metrology, and lithography.
- The developed ANILAS mapping technique aids in understanding and correcting illumination distortions for improved imaging accuracy.
