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Updated: Mar 11, 2026

Picometer-Precision Atomic Position Tracking through Electron Microscopy
Published on: July 3, 2021
Locating light and heavy atomic column positions with picometer precision using ISTEM
K H W van den Bos1, F F Krause2, A Béché1
1Electron Microscopy for Materials Science (EMAT), University of Antwerp, Groenenborgerlaan 171, 2020 Antwerp, Belgium.
Abstract:
Recently, imaging scanning transmission electron microscopy (ISTEM) has been proposed as a promising new technique combining the advantages of conventional TEM (CTEM) and STEM (Rosenauer et al., 2014 [1]). The ability to visualize light and heavy elements together makes it a particularly interesting new, spatially incoherent imaging mode. Here, we evaluate this technique in term of precision with which atomic column locations can be measured. By using statistical parameter estimation theory, we will show that these locations can be accurately measured with a precision in the picometer range. Furthermore, a quantitative comparison is made with HAADF STEM imaging to investigate the advantages of ISTEM.
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