5 V Compatible Two-Axis PZT Driven MEMS Scanning Mirror with Mechanical Leverage Structure for Miniature LiDAR...

Area of Science:

• Micro-Electro-Mechanical Systems (MEMS)
• Optical MEMS
• Photonics

Background:

• MEMS scanning mirrors are crucial for applications like laser displays, bio-medical imaging, and LiDAR.
• Existing two-axis MEMS mirrors often require higher driving voltages, limiting their use with standard power supplies.
• There is a significant market demand for low-driving-voltage and low-power MEMS mirrors.

Purpose of the Study:

• To design, model, fabricate, and characterize an ultra-low voltage driven two-axis MEMS scanning mirror.
• To achieve 5V compatibility for broader application in universal power supply systems.
• To reduce power consumption through innovative design and impedance matching techniques.

Main Methods:

• A two-axis MEMS scanning mirror utilizing mechanical leverage driven by Lead zirconate titanate (PZT) ceramic was designed and fabricated.
• Impedance matching for PZT ceramic was optimized using a novel two-frequency mixed signal driving method.
• The device was characterized to evaluate its scanning performance, voltage, and power consumption.

Main Results:

• The developed MEMS scanning mirror achieved a two-axis scanning angle of 41.9° × 40.3°.
• The device operates at an ultra-low total driving voltage of 4.2 Vpp and a low total power of 16 mW.
• The mirror has an effective diameter of 2 mm and operates at scanning frequencies of 947.51 Hz and 1464.66 Hz.

Conclusions:

• The presented MEMS scanning mirror successfully meets the demand for ultra-low voltage and low-power operation.
• The 5V compatibility and high scanning performance make it suitable for diverse commercial applications.
• The novel impedance matching technique contributes to reduced power consumption in MEMS scanning mirrors.