Focusing subwavelength grating coupler for mid-infrared suspended membrane germanium waveguides

We present a focusing subwavelength grating (SWG) for efficient coupling of mid-infrared (mid-IR) light into suspended membrane Ge photonic integrated circuits (PICs) that enable mid-IR applications in the entire fingerprint region. By virtue of their wide spectral transparency window and air-cladding device configuration, the suspended membrane Ge PICs are expected to be effective for mid-IR applications over the spectral region covering from 2 to 15 μm. Specifically, we demonstrate the maximum coupling efficiency of -11  dB with a 1-dB bandwidth of ∼58  nm at the SWG's center wavelength of 2.37 μm. Our focusing SWG is expected to advance the development of on-chip long-wavelength mid-IR applications such as biochemical sensing, thermal imaging, and nonlinear optics in the fingerprint region.