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Related Concept Videos

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Updated: Feb 27, 2026

Quantitative Atomic-Site Analysis of Functional Dopants/Point Defects in Crystalline Materials by Electron-Channeling-Enhanced Microanalysis
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Optimizing noise for defect analysis with through-focus scanning optical microscopy.

Ravikiran Attota1, John Kramar1

  • 1Engineering Physics Division, PML, NIST, Gaithersburg, Maryland, 20899, USA.

Proceedings of Spie--The International Society for Optical Engineering
|July 1, 2017
PubMed
Summary
This summary is machine-generated.

Minimizing system noise is crucial for through-focus scanning optical microscopy (TSOM) in patterned defect analysis. This study optimizes TSOM parameters for better signal-to-noise ratio and acquisition time, enhancing defect analysis accuracy.

Keywords:
TSOMdefect analysisnoise optimization

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Area of Science:

  • Metrology
  • Optical Microscopy
  • Surface Analysis

Background:

  • Through-focus scanning optical microscopy (TSOM) is a 3D shape metrology technique.
  • TSOM offers sub-nanometer measurement sensitivity using conventional optical microscopes.
  • Minimizing system noise is essential for effective patterned defect analysis with TSOM.

Purpose of the Study:

  • To conduct a systematic noise-analysis study for TSOM.
  • To optimize data collection and processing parameters for TSOM.
  • To demonstrate the impact of optimized parameters on defect analysis.

Main Methods:

  • Acquisition of image sets through-focus using a conventional optical microscope.
  • Systematic analysis of noise sources affecting TSOM performance.
  • Optimization of spatial averaging, background-signal subtraction, and image alignment.

Main Results:

  • Judicious spatial averaging balances signal-to-noise performance and acquisition time.
  • Accurate background-signal subtraction corrects for imaging-system inhomogeneities.
  • Careful alignment of constituent images is critical for differential TSOM analysis.

Conclusions:

  • Optimized TSOM parameters significantly improve patterned defect analysis.
  • Noise reduction strategies enhance the reliability and sensitivity of TSOM.
  • The study provides a framework for maximizing TSOM's potential in metrology.