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Spot auto-focusing and spot auto-stigmation methods with high-definition auto-correlation function in high-resolution
Shigeto Isakozawa1, Taishi Fuse2, Junpei Amano2
1Research Institute for Science and Technology, Kogakuin University, 2665-1 Nakano, Hachioji, Tokyo 192-0015, Japan.
Microscopy (Oxford, England)
|January 30, 2018
Summary
New methods for transmission electron microscopy (TEM) utilize a high-definition auto-correlation function (HD-ACF) for improved auto-focusing (AF) and auto-stigmation (AS). These techniques enhance image quality, even with low signal-to-noise ratios.
Area of Science:
- Materials Science
- Microscopy
- Physics
Background:
- Traditional diffractogram-based methods in transmission electron microscopy (TEM) can be limited.
- Developing advanced techniques for precise image acquisition is crucial for nanoscale analysis.
Purpose of the Study:
- To introduce novel spot auto-focusing (AF) and auto-stigmation (AS) methods for high-resolution TEM.
- To present a unique high-definition auto-correlation function (HD-ACF) for improved performance.
Main Methods:
- Development and application of the HD-ACF for analyzing small amorphous-thin-film images.
- Utilizing AF and AS methods with HD-ACF on a 120-kV TEM at 300k magnification.
- Smallest analyzed areas: 64x64 pixels (~3 nm2) for AF and 256x256 pixels for AS.
Main Results:
- The HD-ACF effectively resolves the central peak region, reflecting the phase contrast transfer function.
- The AF function demonstrates accuracy even with low signal-to-noise ratio (s/n ~1.0) images.
- A reference database of HD-ACF defocus dependency is required for method application.
Conclusions:
- The presented HD-ACF-based AF and AS methods offer viable alternatives to diffractogram-based techniques in HRTEM.
- These methods are robust, performing well even in low signal conditions.
- Applicability extends beyond weak phase objects, broadening their utility in electron microscopy.
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