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Updated: Feb 15, 2026

Uncovering Hidden Dynamics of Natural Photonic Structures Using Holographic Imaging
Published on: March 31, 2022
Multi-photon vertical cross-sectional imaging with a dynamically-balanced thin-film PZT z-axis microactuator
Jongsoo Choi1, Xiyu Duan2, Haijun Li2
1University of Michigan, Ann Arbor, mi, 48109. He is now with Vesper Technologies, Boston, ma.
Abstract:
Use of a thin-film piezoelectric microactuator for axial scanning during multi-photon vertical cross-sectional imaging is described. The actuator uses thin-film lead-zirconate-titanate (PZT) to generate upward displacement of a central mirror platform, micro-machined from a silicon-on-insulator (SOI) wafer to dimensions compatible with endoscopic imaging instruments. Device modeling in this paper focuses on existence of frequencies near device resonance producing vertical motion with minimal off-axis tilt even in the presence of multiple vibration modes and non-uniformity in fabrication outcomes. Operation near rear resonance permits large stroke lengths at low voltages relative to other vertical microactuators. Highly uniform vertical motion of the mirror platform is a key requirement for vertical cross-sectional imaging in the remote scan architecture being used for multi-photon instrument prototyping. The stage is installed in a benchtop testbed in combination with an electrostatic mirror that performs in-plane scanning. Vertical sectional images are acquired from 15 μm diameter beads and excised mouse colon tissue.
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