Fabrication of LCE Microactuator Arrays Through Soft Lithography with Surface Alignment

Ke Li1, Jae-Jun Kim1, Jayer Fernandes1

  • 1Department of Electrical and Computer Engineering, University of Wisconsin - Madison, Madison, WI - 53705.

Journal of Microelectromechanical Systems : a Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems
|July 28, 2025
PubMed
Summary

This study presents a low-cost surface alignment method for fabricating liquid crystal elastomer (LCE) microactuator arrays. This technique enhances accessibility and manufacturability for LCE microactuators in soft robotics and MEMS applications.