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Compact, scan-pattern-switchable 2D piezoelectric MEMS mirror with 1D addressable scanning.

Joonyoung Yu1, Yi Zhu2, Mayur Birla1

  • 1Dept. of Mechanical Engineeering, University of Michigan, Ann Arbor, MI.

Journal of Microelectromechanical Systems : a Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems
|April 23, 2026
PubMed
Summary
This summary is machine-generated.

This study introduces a novel piezoelectric micromirror for laser imaging systems. It achieves a large static scan angle and high-frequency dual-axis operation, enabling smaller, high-performance instruments.

Keywords:
dynamicsimagingmicromirrorpiezoelectric

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Area of Science:

  • Optics and Photonics
  • Micro-electro-mechanical Systems (MEMS)

Background:

  • Micro-scale scan mirrors are crucial for miniaturizing laser-based imaging systems.
  • Key performance metrics include wide motion range, high operating frequency, and static positioning.

Purpose of the Study:

  • To demonstrate a piezoelectric micromirror with a dual cantilever architecture.
  • To achieve both large static scan angles and high-frequency, large-angle dual-axis operation.

Main Methods:

  • Utilized nonlinear dynamics in bending and torsion within a dual cantilever design.
  • Developed a bar and hinge simulation model to capture nonlinear dynamics.
  • Fabricated prototype mirrors with a small form factor (1.8x2.1 mm² chip).

Main Results:

  • Achieved a total mechanical scan angle (MSA) of 112° in slow axis resonance.
  • Demonstrated 11° of addressable static scan angle in the bending axis.
  • Attained a total MSA of 15° at 3 kHz in the fast axis.

Conclusions:

  • The piezoelectric micromirror offers a unique combination of static and dynamic scanning capabilities.
  • Suitable for high frame rate Lissajous or raster scanning in microendoscopes.
  • Static scan angle provides significant 1D addressability for advanced imaging applications.