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Updated: Feb 8, 2026

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Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
Published on: September 14, 2018
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High-quality tailored-edge cleaving using aberration-corrected Bessel-like beams.
Optics Letters
|June 30, 2018
Summary
This study introduces aberration-corrected Bessel-like laser beams for precise glass cutting with bevels. The method compensates for distortions, achieving high-quality edges in silicate glass.
Area of Science:
- Optics and Photonics
- Materials Science
- Laser Technology
Background:
- Laser cutting of glass often faces challenges with edge quality and achieving precise bevels.
- Aberrations in laser beams can degrade cutting precision and surface finish.
- Controlling beam propagation through tilted material surfaces is complex.
Purpose of the Study:
- To develop and demonstrate a novel laser cutting technique for creating beveled edges in glass.
- To investigate the use of aberration-corrected Bessel-like beams for enhanced glass processing.
- To precompensate for optical aberrations introduced by tilted glass surfaces.
Main Methods:
- Utilizing ultrashort laser pulses shaped into aberration-corrected Bessel-like beams.
- Employing digital holography for precompensation of phase distortions.
- Inclining the glass material's entrance surface relative to the processing optics.
- Applying pump-probe microscopy for theoretical verification.
Main Results:
- Achieved high-quality, clean edges on nonstrengthened silicate glass with precise bevels.
- Successfully demonstrated precompensation of aberrations using digital holography.
- Validated theoretical models through experimental observations.
Conclusions:
- Aberration-corrected Bessel-like beams offer a viable solution for high-precision laser cutting of glass with bevels.
- The developed method effectively mitigates optical distortions, leading to superior edge quality.
- This technique advances laser processing capabilities for brittle materials like glass.
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