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Updated: Feb 4, 2026

Comprehensive Characterization of Extended Defects in Semiconductor Materials by a Scanning Electron Microscope
Published on: May 28, 2016
Marika Schleberger1, Jani Kotakoski2
1Fakultät für Physik and Cenide, Universität Duisburg-Essen, Lotharstraße 1, 47057 Duisburg, Germany. marika.schleberger@uni-due.de.
Defect engineering in two-dimensional (2D) materials using particle irradiation enables precise control over material properties for novel devices. Understanding atomic-scale defect creation mechanisms is key for advancing 2D material applications.
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