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Mechanical Response of MEMS Inductor with Auxiliary Pillar under High-g Shock

Lixin Xu1, Yiyuan Li2, Jianhua Li3

  • 1School of Mechatronical Engineering, Beijing Institute of Technology, Beijing 100081, China. lxxu@bit.edu.cn.

Micromachines
|November 15, 2018
PubMed

Keywords:
MEMS reliabilityMEMS suspended inductorhigh mechanical shockresponse analysis

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