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Vibration-Assisted Roll-Type Polishing System Based on Compliant Micro-Motion Stage.
Yan Gu1, Xiuyuan Chen2, Jieqiong Lin3
1School of Mechatronic Engineering, Changchun University of Technology, Changchun 130012, China. guyan@ccut.edu.cn.
Micromachines
|November 15, 2018
Summary
This study developed a precision polishing system using a novel piezo-driven micro-motion stage. The system achieved a high-quality silicon carbide surface finish of 36 nm Sa, demonstrating effective vibration-assisted material removal.
Area of Science:
- Precision Engineering
- Mechanical Engineering
- Materials Science
Background:
- Achieving high-quality surfaces is critical in precision manufacturing.
- Existing micro-motion stages often face limitations in precision and control.
- Vibration-assisted polishing offers potential for enhanced material removal efficiency.
Purpose of the Study:
- To develop a piezo-driven, flexure-based micro-motion stage for vibration-assisted precision polishing.
- To model and optimize the flexure mechanism for improved performance.
- To validate the system's capability in generating high-quality surfaces on silicon carbide.
Main Methods:
- Design and fabrication of a flexure-based micro-motion stage.
- Application of the compliance matrix method for mechanism modeling.
- Optimization of mechanism dimensions using the Grey Wolves Optimization (GWO) algorithm.
- Verification of models using finite-element analysis (FEA).
- Experimental validation through closed-loop testing and surface characterization.
Main Results:
- A functional piezo-driven micro-motion stage was successfully developed.
- The Grey Wolves Optimization algorithm effectively maximized natural frequencies.
- FEA and closed-loop tests confirmed the stage's precise micro-positioning capabilities.
- A high-quality silicon carbide surface with 36 nm Sa was achieved.
Conclusions:
- The developed flexure-based micro-motion stage is suitable for vibration-assisted precision polishing.
- The integrated system demonstrates effective material removal and surface generation capabilities.
- This research contributes to advancements in high-precision surface finishing technologies.
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