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Updated: Jan 27, 2026

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Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
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High-efficiency Ge thermo-optic phase shifter on Ge-on-insulator platform
Optics Express
|March 17, 2019
Summary
We developed a Germanium (Ge) thermo-optic (TO) phase shifter on a Ge-on-insulator (GeOI) platform. This Ge TO phase shifter offers higher modulation efficiency and lower power consumption for mid-infrared (MIR) photonic circuits.
Area of Science:
- Photonics
- Materials Science
- Integrated Optics
Background:
- Silicon (Si) thermo-optic (TO) phase shifters are crucial for integrated photonics.
- Mid-infrared (MIR) applications require efficient and low-power photonic devices.
Purpose of the Study:
- To develop and characterize a novel Germanium (Ge) thermo-optic (TO) phase shifter on a Ge-on-insulator (GeOI) platform.
- To evaluate the performance of Ge-based TO phase shifters for MIR integrated photonics.
Main Methods:
- Fabrication of a Ge TO phase shifter on a GeOI wafer.
- Numerical analysis of Ge and Si TO phase shifter performance.
- Experimental characterization of phase shift and operating power at 1.95 μm wavelength.
Main Results:
- The Ge TO phase shifter demonstrated three times higher modulation efficiency compared to Si TO phase shifters.
- Achieved a phase shift of π with an operating power of 7.8 mW.
- This operating power is less than half of previously reported Si TO phase shifters.
Conclusions:
- Ge TO phase shifters on GeOI platforms are highly promising for high-performance, low-power MIR photonic integrated circuits.
- These devices are suitable for diverse applications in sensing and communication.
- The superior properties of Ge enable advancements in MIR integrated photonics.
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