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Fabrication of 3D Carbon Microelectromechanical Systems C-MEMS
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Particle Tracking of Microelectromechanical System Performance and Reliability

Craig R Copeland1, Craig D McGray1, Jon Geist1

  • 1National Institute of Standards and Technology, Gaithersburg, MD 20899 USA.

Journal of Microelectromechanical Systems : a Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems
|May 17, 2019
PubMed
Abstract

Keywords:
Fluorescencemotionparticlereliabilitystiction

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