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Patterned probes for high precision 4D-STEM bragg measurements.

Steven E Zeltmann1, Alexander Müller2, Karen C Bustillo2

  • 1Department of Materials Science and Engineering, University of California, Berkeley 94720, USA.

Ultramicroscopy
|November 20, 2019
PubMed
Summary
This summary is machine-generated.

Patterned probes significantly enhance nanoscale strain mapping precision in four-dimensional scanning transmission electron microscopy (4D-STEM). This method improves the accuracy of local deformation measurements by overcoming challenges from electron scattering and noise.

Keywords:
4D-STEMElectron diffractionNanobeam electron diffractionScanning transmission electron microscopyStrain mapping

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Area of Science:

  • Materials Science
  • Electron Microscopy
  • Nanotechnology

Background:

  • Four-dimensional scanning transmission electron microscopy (4D-STEM) is crucial for nanoscale strain mapping.
  • Accurate strain measurement is limited by dynamical scattering, inelastic scattering, and shot noise, hindering computational detection of diffracted disks.
  • Existing methods struggle with precise position measurements of diffracted disks, impacting local deformation analysis.

Purpose of the Study:

  • To investigate the use of patterned probes for improving strain mapping precision in 4D-STEM.
  • To enhance the robustness of automated computational detection and position measurement of diffracted disks.
  • To quantify the improvement in strain measurement precision using patterned probes.

Main Methods:

  • Imprinting a "bullseye" pattern onto the electron probe using a binary mask in the probe-forming aperture.
  • Applying the patterned probe technique to an unstrained silicon reference sample.
  • Utilizing multislice simulations to analyze the effects of sample thickness and electron dose.

Main Results:

  • Bullseye probes substantially improved strain-mapping precision compared to standard probes.
  • Strain measurement precision improved from 2.7% to 0.3% for thin silicon samples and 4.7% to 0.8% for thick samples.
  • A slight decrease in spatial resolution was observed with patterned probes.

Conclusions:

  • Patterned probes offer a significant advancement in 4D-STEM strain mapping precision.
  • The bullseye probe technique effectively mitigates issues caused by intensity modulations within diffracted disks.
  • Further research using simulations is needed to understand the limits of accuracy and precision based on sample thickness and electron dose.