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μ-Coriolis Mass Flow Sensor with Resistive Readout.

Thomas Schut1, Remco Wiegerink1, Joost Lötters1,2

  • 1MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands.

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Summary

This study introduces a micro-Coriolis mass flow sensor using a novel resistive readout. This sensor achieves higher sensitivity and stability compared to traditional capacitive methods, enabling more precise fluid flow measurements.

Keywords:
channelcoriolisflowflow sensormass flowresistiveresonatorstrain gauge

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Area of Science:

  • Microelectromechanical systems (MEMS)
  • Sensor technology
  • Fluid dynamics

Background:

  • Traditional capacitive Coriolis mass flow sensors are limited by actuation amplitude and sensitivity to external disturbances.
  • Existing micro-flow sensors often lack the precision required for demanding applications.

Purpose of the Study:

  • To present a novel micro-Coriolis mass flow sensor utilizing a resistive readout.
  • To demonstrate the advantages of resistive readout over capacitive readout in terms of actuation amplitude and sensitivity.
  • To evaluate the performance of different device implementations.

Main Methods:

  • Development of a micro-Coriolis mass flow sensor with a resistive readout detecting micro-fluidic channel deformation.
  • Operation of the resistive readout in two distinct actuation vibrational modes.
  • Fabrication and testing of three distinct device prototypes.

Main Results:

  • One device prototype demonstrated superior performance with a flow sensitivity of 2.22 °/(g/h).
  • Achieved a zero-flow stability of 0.02 g/h over a 30-minute period.
  • Identified potential for further performance enhancement through strain gauge optimization.

Conclusions:

  • The resistive readout micro-Coriolis mass flow sensor offers significant advantages over capacitive designs.
  • The developed sensor technology shows promise for high-precision fluid flow measurement.
  • Further optimization of strain gauges can lead to even greater sensor accuracy and stability.