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Updated: Dec 10, 2025

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
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Large-Displacement Vertical Electrostatic Microactuator Dynamics using Duty-Cycled Softening/Stiffening Parametric

H Li1, P Barnes2, E Harding2

  • 1University of Michigan Medical School, Ann Arbor MI.

Journal of Microelectromechanical Systems : a Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems
|September 1, 2020
PubMed

Keywords:
Biomedical microscopyDynamicsElectrostatic devicesMicroactuators

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