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Traceable Reference Full Metrology Chain for Innovative Aspheric and Freeform Optical Surfaces Accurate at the

Yassir Arezki1,2, Rong Su3, Ville Heikkinen4

  • 1Laboratoire Commun de Métrologie (LCM), Laboratoire National de Métrologie et d'Essais (LNE), 1 Rue Gaston Boissier, 75015 Paris, France.

Sensors (Basel, Switzerland)
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Summary

This study developed reference aspheric and freeform optical elements for calibrating ultra-high precision measurement systems. The new metrology chain ensures traceable form error analysis for optical surfaces.

Keywords:
aspheric and freeform optical elementsdimensional metrologymeasured data evaluationrobust reference minimum zone (Hybrid Trust Region) fittingultra-high precision measuring machineuncertainty

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Area of Science:

  • Optics and Metrology
  • Optical Engineering
  • Surface Metrology

Background:

  • Accurate calibration of ultra-high precision measurement systems is crucial for advanced optical manufacturing.
  • Aspheric and freeform optical surfaces present unique challenges in form error analysis.
  • Existing metrology methods require robust reference standards for verification.

Purpose of the Study:

  • To design and verify innovative reference aspheric and freeform optical elements.
  • To establish a traceable metrology chain for ultra-high accurate measurement systems.
  • To enable precise form error analysis of complex optical surfaces.

Main Methods:

  • Design of thermo-invariant material measures for aspheric and freeform optics.
  • Manufacturing using magnetorheological finishing (MRF).
  • Application of a robust reference minimum zone (Hybrid Trust Region) fitting algorithm for data analysis.

Main Results:

  • Successful design and manufacturing of two reference material measures.
  • Evaluation of multiple ultra-high-precision measurement machines using the designed elements.
  • Demonstrated agreement among multiple partners, validating the metrology chain.

Conclusions:

  • The developed metrology chain provides a traceable method for aspheric and freeform optical surface verification.
  • The reference elements enable accurate form error analysis for small-amplitude surfaces.
  • This advancement supports the calibration and verification of ultra-high accurate optical measurement systems.