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Precision Optical Metrology and Smart Sensing

Xiangchao Zhang1, Jian Wang2, Yajun Wang3

  • 1Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing, Fudan University, Shanghai 200438, China.

Sensors (Basel, Switzerland)
|November 9, 2024
PubMed
Summary

Optics offers non-contact measurement, versatility, and high sensitivity for advancing precision metrology. This technology is key to developing sophisticated measurement tools and techniques.

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