Flexible Measurement of High-Slope Micro-Nano Structures with Tilted Wave Digital Holographic Microscopy

Digital holographic microscopy is an important measurement method for micro-nano structures. However, when the structured features are of high-slopes, the interference fringes can become too dense to be recognized. Due to the Nyquist's sampling limit, reliable wavefront restoration and phase unwrapping are not feasible. To address this problem, the interference fringes are proposed to be sparsified by tilting the reference wavefronts. A data fusion strategy including region extraction and tilt correction is developed for reconstructing the full-area surface topographies. Experimental results of high-slope elements demonstrate the validity and reliability of the proposed method.