MEMS development focusing on collaboration using common facilities: a retrospective view and future directions

Area of Science:

• Materials Science
• Electrical Engineering
• Mechanical Engineering

Background:

• Microelectromechanical systems (MEMS) technology development and industry support through collaboration.
• Establishment of an in-house facility for prototyping MEMS and integrated circuits (ICs) on 20 mm square wafers.

Purpose of the Study:

• To showcase the development and application of MEMS technology.
• To present advancements in heterogeneous integration (MEMS on LSI) for complex systems.
• To discuss future research trajectories in MEMS.

Main Methods:

• Prototyping of various MEMS devices including pressure sensors, gyroscopes, and optical scanners.
• Development of MEMS on LSI (heterogeneous integration) using foundry-fabricated LSI.
• Adaptation of an old semiconductor factory into an open access facility for 4- and 6-inch wafer MEMS production.

Main Results:

• Commercialized MEMS devices such as integrated capacitive pressure sensors, electrostatically levitated rotational gyroscopes, and two-axis optical scanners.
• Successful application of MEMS on LSI technology in areas like tactile sensor networks for robots, multi FBAR filters, and electron emitter arrays.
• Creation of a versatile open hands-on access facility supporting numerous companies in MEMS production.

Conclusions:

• The developed MEMS technology and integration capabilities enable sophisticated system designs.
• The open access facility fosters industry-wide MEMS innovation and production.
• Continued research is essential for advancing the future of MEMS technology.