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Updated: Oct 2, 2025

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Advances in laboratory-scale ptychography using high harmonic sources [Invited].

Lars Loetgering, Stefan Witte, Jan Rothhardt

    Optics Express
    |February 25, 2022
    PubMed
    Summary

    Tabletop ptychography using high harmonic generation sources enables advanced ultrafast applications. This review details hardware, algorithms, and applications for extreme ultraviolet microscopy and wavefront sensing.

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    Area of Science:

    • Optics and Photonics
    • Ultrafast Science
    • Materials Science

    Background:

    • Extreme ultraviolet (EUV) microscopy and wavefront sensing are critical for next-generation ultrafast applications.
    • Challenges include chemically-resolved imaging, focal spot diagnostics, and actinic metrology for advanced lithography.
    • Ptychography, an advanced imaging technique, has been adapted from electron and synchrotron communities.

    Purpose of the Study:

    • To review the state-of-the-art in tabletop ptychography utilizing high harmonic generation (HHG) sources.
    • To discuss hardware and algorithmic advancements enabling laboratory-based EUV ptychography.
    • To highlight key technological applications of this technique.

    Main Methods:

    • Review of illumination optics and detector concepts for tabletop EUV ptychography.

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  • Analysis of algorithmic approaches for processing multispectral ptychography data.
  • Exploration of high harmonic generation (HHG) as a bright, stable EUV source.

    • Main Results:

    • Demonstration of ptychography's transferability to laboratory settings using HHG sources.
    • Identification of optimal hardware configurations and data analysis strategies.
    • Successful application in multispectral wavefront sensing and attosecond pulse characterization.

    Conclusions:

    • Tabletop EUV ptychography with HHG sources is a mature and versatile technique.
    • It provides robust solutions for advanced imaging and metrology in ultrafast science.
    • Future applications include depth-resolved imaging and enhanced characterization of ultrafast phenomena.