Accurate and Robust Calibration of the Uniform Affine Transformation Between Scan-Camera Coordinates for

Shoucong Ning1,2, Wenhui Xu3,4, Yinhang Ma5

  • 1Department of Materials Science and Engineering, National University of Singapore, Singapore117575, Singapore.

Summary

A new hybrid method accurately calibrates scan and camera coordinates in four-dimensional scanning transmission electron microscopy (4D-STEM) using raw data. This approach enhances ptychographic reconstructions and is robust against distortions and specimen defects.