Capacitive Sensors with Hybrid Dielectric Structures and High Sensitivity over a Wide Pressure Range for Monitoring

Zhiping Feng1, Qiang He1, Xue Wang1

  • 1Department of Optoelectronic Engineering, Key Laboratory of Optoelectronic Technology and Systems, Ministry of Education, Chongqing University, Chongqing400044, P. R. China.