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A Differential Confocal Sensor for Simultaneous Position and Slope Acquisitions Based on a Zero-Crossing Prediction

Tingyu Wang1,2,3, Zhiyi Wang1,2,3, Yongqiang Yang1,2

  • 1Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China.

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Summary
This summary is machine-generated.

A novel sensor accurately measures 3D free-form surface profiles using a single-exposure, zero-crossing method. This high-speed system achieves precise position and angle detection for advanced surface metrology.

Keywords:
confocal microscopyposition sensorreal-time optical imagingslope sensorsurface predictionzero-crossing prediction algorithm

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Area of Science:

  • Optical Metrology
  • Surface Profilometry
  • Microscopy

Background:

  • Accurate measurement of three-dimensional (3D) free-form surfaces is critical in advanced manufacturing and quality control.
  • Existing methods often face challenges in speed, accuracy, and ease of system setup for complex surfaces.

Purpose of the Study:

  • To propose and validate a new sensor for simultaneous position and angle measurement of 3D free-form surfaces.
  • To enhance the accuracy and efficiency of surface profile detection using a novel optical approach.

Main Methods:

  • Development of a sensor based on the single-exposure, zero-crossing method.
  • Accurate modeling of field intensity distribution in a confocal microscope's objective.
  • Implementation of a sliding window-based zero-crossing prediction method for camera triggering.
  • Application of a fast, spatially convergent peak-extraction algorithm.

Main Results:

  • Achieved an average error of 17.63 nm for surface profile prediction.
  • Measured tilt degree with an average error of 0.011° within a 0-8° range.
  • Obtained a prediction error of 0.089° for tilt direction within a 0-360° range.
  • Demonstrated high-speed, real-time image acquisition capabilities.

Conclusions:

  • The proposed sensor effectively measures surface profiles and angles of 3D free-form surfaces with high accuracy and speed.
  • The single-exposure, zero-crossing method simplifies system setup and adjustment.
  • The sensor shows potential for precision detection in 3D surface metrology applications.