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Picophotonic localization metrology beyond thermal fluctuations
Tongjun Liu1, Cheng-Hung Chi1, Jun-Yu Ou1,2
1Optoelectronics Research Centre and Centre for Photonic Metamaterials, University of Southampton, Southampton, UK.
Nature Materials
|May 11, 2023
Summary
Researchers achieved subatomic precision in optical metrology, resolving nanowire positions with 92pm accuracy. This breakthrough bridges the resolution gap, enabling picometre-scale measurements of nanostructures beyond thermal motion.
Area of Science:
- Optics and Photonics
- Nanotechnology
- Metrology
Background:
- A significant resolution gap exists between atomic-scale electron microscopy and conventional optical techniques.
- Optical metrology of nanostructures exhibiting Brownian motion at high resolution remains a challenge.
Purpose of the Study:
- To demonstrate optical imaging and metrology of nanostructures with subatomic precision.
- To overcome the resolution limitations of current optical techniques for studying nanoscale phenomena.
Main Methods:
- Utilized deep-learning analysis of topologically structured light scattering.
- Employed single-shot measurements with a 488nm wavelength light source.
- Focused on localizing a nanowire with a thermal oscillation amplitude of approximately 150pm.
Main Results:
- Achieved subatomic precision of 92pm in resolving the nanowire's average position.
- Demonstrated sub-Brownian metrology with a precision of approximately λ/5,300.
- Showcased non-invasive metrology with absolute errors down to a fraction of an atom's size.
Conclusions:
- Optical metrology can achieve subatomic precision, surpassing previous limitations.
- This technique enables the study of picometre-scale phenomena in nanostructures using light.
- Opens new avenues for advanced nanoscale imaging and measurement.
