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Updated: Jul 24, 2025

Fabrication of Low Temperature Carbon Nanotube Vertical Interconnects Compatible with Semiconductor Technology
Published on: December 7, 2015
Eunhwan Jo1, Yunsung Kang1, Sangjun Sim1
1School of Mechanical Engineering, Yonsei University, 50 Yonsei-ro, Seodaemun-gu, Seoul 03722, Republic of Korea.
High-temperature nano/micro-electromechanical (NEM/MEM) switches utilize carbon nanotube (CNT) arrays for stable operation up to 550°C. These CNT-based MEM switches offer over a million cycles, enabling high-temperature integrated circuits.
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