Crosstalk suppression in CMOS terahertz detectors by using a mushroom-like AMC structure

The suppression of the crosstalk in a CMOS THz detector is essential for enhancing the performance of detector arrays; however, it presents several technical challenges at the chip level. In this paper, a novel structure featuring a mushroom-like artificial magnetic conductor (M-AMC) is developed to suppress the crosstalk between CMOS THz detectors with on-chip antennas. Three-dimensional simulation results show that the M-AMC structure, which is designed by metal Al and doped-Si materials in the CMOS process, not only reduces the transmission coefficient of the electromagnetic wave between adjacent pixels but also enhances the electric field of the target pixels. A 0.65 THz detector array with a M-AMC structure based on the on-chip antenna was fabricated. Experimental results present that after implanting the M-AMC structure, the noise equivalent power (NEP) at the central frequency of pixels significantly decreases by 315.5%. Moreover, the distribution of NEP becomes more uniform, as evidenced by a reduction in the standard deviation coefficient of 26.3%. This demonstrates the effectiveness of the method in suppressing crosstalk and improving the responsivity of CMOS THz detectors, which can be used for high-performance THz detector arrays.