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Updated: Jul 17, 2025

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Terahertz Microfluidic Sensing Using a Parallel-plate Waveguide Sensor
Published on: August 30, 2012
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Terahertz disk resonator on a substrateless dielectric waveguide platform.
Optics Letters
|September 1, 2023
Summary
We developed novel terahertz integrated disk resonators on a low-loss silicon platform. These resonators achieve a high quality factor (Q-factor) and tunable resonance, enabling advanced sensing and communication applications.
Area of Science:
- Integrated photonics
- Terahertz (THz) technology
- Resonant cavity devices
Background:
- Terahertz integrated systems rely on resonant cavities, but existing platforms suffer from high losses.
- Developing low-loss platforms is crucial for enhancing the performance of THz devices.
Purpose of the Study:
- To propose and demonstrate a series of integrated disk resonators on a substrateless silicon waveguide platform.
- To achieve high quality factor (Q-factor) and tunable resonance in THz integrated systems.
Main Methods:
- Fabrication of disk resonators integrated into a low-loss, substrateless silicon waveguide.
- Utilizing an effective medium for controlling resonance and Q-factor.
- Optical power modulation for tuning resonator characteristics.
Main Results:
- Demonstrated Q-factors up to 9146 at 274.4 GHz, attributed to the low-loss platform.
- Observed strong tunability of resonance under moderate optical power.
- Validated the effectiveness of the substrateless silicon waveguide for high-performance THz resonators.
Conclusions:
- The proposed terahertz integrated disk resonators offer superior performance due to the low-loss platform.
- These resonators exhibit significant tunability, making them suitable for dynamic applications.
- The developed technology paves the way for advanced THz sensing and communication systems.
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