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A Buried Thermal Rail (BTR) Technology to Improve Electrothermal Characteristics of Complementary Field-Effect

Zhecheng Pan1, Tao Liu1, Jingwen Yang1

  • 1School of Microelectronics, Fudan University, Shanghai 200433, China.

Micromachines
|September 28, 2023
PubMed

Keywords:
buried power rail (BPR)complementary field-effect transistor (CFET)power delivery network (PDN)self-heating effect (SHE)technology computer-aided design (TCAD)

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