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Snapshot Mueller spectropolarimeter imager.

Tianxiang Dai1, Thaibao Phan1, Evan W Wang1

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Summary
This summary is machine-generated.

This study presents a novel imaging system for simultaneous Mueller polarization and wavelength measurements. This technology enables precise thin film thickness mapping for advanced optical metrology applications.

Keywords:
Micro-opticsNanophotonics and plasmonicsOptical sensors

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Area of Science:

  • Optics and Photonics
  • Materials Science
  • Computational Imaging

Background:

  • Accurate polarization and wavelength measurements are crucial for material characterization and optical metrology.
  • Existing imaging systems often require multiple captures or complex setups, limiting real-time analysis.
  • Simultaneous acquisition of polarization and spectral information presents a significant challenge in optical imaging.

Purpose of the Study:

  • To develop an advanced imaging system capable of simultaneously capturing complete Mueller polarization responses across multiple wavelength channels in a single image acquisition.
  • To demonstrate a real-time calibration method for this novel imaging system using a customized neural network.
  • To validate the system's performance by accurately reconstructing a thin film thickness map.

Main Methods:

  • Implementation of a division-of-focal-plane concept integrating multiplexed Fourier optics and a telescopic light-field imaging system.
  • Utilization of broadband nanostructured plasmonic polarizers as functional pinhole apertures for polarization-resolved imaging.
  • Development and application of a neural network-based calibration approach for real-time data processing.

Main Results:

  • Successful simultaneous recording of complete Mueller polarization responses and wavelength channels in a single image capture.
  • Highly interpretable polarization and wavelength information directly recorded on the image sensor.
  • Accurate reconstruction of a thin film thickness map from a four-inch wafer using the calibrated system.

Conclusions:

  • The developed imaging system offers a significant advancement in simultaneous polarization and spectral imaging.
  • The real-time calibration method enhances the system's practical applicability in metrology and machine vision.
  • This technology holds potential for diverse applications in metrology, machine vision, computational imaging, and optical computing.