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The Effect of Anodization Parameters on the Aluminum Oxide Dielectric Layer of Thin-Film Transistors
Published on: May 24, 2020
Adam Charnas1,2, Zhuocheng Zhang1,2, Zehao Lin1,2
1Elmore Family School of Electrical and Computer Engineering, Purdue University, West Lafayette, IN, 47907, USA.
Ultra-thin indium oxide transistors achieve high performance, overcoming limitations of traditional semiconductors. Atomic layer deposition enables enhanced mobility and on/off ratios for advanced electronic applications.
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