A Comprehensive Study of NF₃-Based Selective Etching Processes: Application to the Fabrication of Vertically Stacked...

In this paper, we demonstrate a comprehensive study of NF₃-based selective etching processes for inner spacer formation and for channel release, enabling stacked horizontal gate-all-around Si nanosheet transistor architectures. A cyclic etching process consisting of an oxidation treatment step and an etching step is proposed and used for SiGe selective etching. The cyclic etching process exhibits a slower etching rate and higher etching selectivity compared to the direct etching process. The cycle etching process consisting of Recipe 1, which has a SiGe etching rate of 0.98 nm/cycle, is used for the cavity etch. The process achieved good interlayer uniformity of cavity depth (cavity depth ≤ 5 ± 0.3 nm), while also obtaining a near-ideal rectangular SiGe etch front shape (inner spacer shape = 0.84) and little Si loss (0.44 nm@ each side). The cycle etching process consisting of Recipe 4 with extremely high etching selectivity is used for channel release. The process realizes the channel release of nanosheets with a multi-width from 30 nm to 80 nm with little Si loss. In addition, a selective isotropic etching process using NF₃/O₂/Ar gas mixture is used to etch back the SiN film. The impact of the O₂/NF₃ ratio on the etching selectivity of SiN to Si and the surface roughness of SiN after etching is investigated. With the introduction of O₂ into NF₃/Ar discharge, the selectivity increases sharply, but when the ratio of O₂/NF₃ is up to 1.0, the selectivity tends to a constant value and the surface roughness of SiN increases rapidly. The optimal parameter is O₂/NF₃ = 0.5, resulting in a selectivity of 5.4 and a roughness of 0.19 nm.