Lorentz Force-Actuated Bidirectional Nanoelectromechanical Switch with an Ultralow Operation Voltage

Area of Science:

• Nanoscience and Nanotechnology
• Electrical Engineering
• Materials Science

Background:

• Conventional nanoelectromechanical switches require high operating voltages (tens of volts), incompatible with complementary metal oxide semiconductor integrated circuits (∼1 V).
• Reducing air gaps to lower operating voltage introduces manufacturing difficulties and adhesion-related failures.
• Surface adhesion forces pose a significant challenge for reliable nanoelectromechanical switch operation.

Purpose of the Study:

• To demonstrate a new nanowire-morphed nanoelectromechanical (NW-NEM) switch structure.
• To achieve ultralow operation voltages for nanoelectromechanical switches.
• To overcome the limitations of conventional electrostatic actuation and surface adhesion.

Main Methods:

• Development of a novel nanowire-morphed nanoelectromechanical (NW-NEM) switch architecture.
• Utilizing bidirectional Lorentz force for actuation instead of unidirectional electrostatic attraction.
• Employing a large air gap for enhanced electrical isolation and reliability.

Main Results:

• Achieved a record-low driving voltage of less than 0.2 V.
• Enabled the use of a large air gap, ensuring excellent electrical isolation.
• Demonstrated effective overcoming of surface adhesion forces for reliable switch recovery.

Conclusions:

• The NW-NEM switch offers a viable solution for low-voltage nanoelectromechanical systems.
• Lorentz force actuation presents a promising alternative to electrostatic actuation in NEMS.
• This technology addresses key challenges in manufacturing and reliability for nanoelectromechanical switches.