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Fully tunable Fabry-Pérot cavity based on MEMS Sagnac loop reflector with ultra-low static power consumption
Young Jae Park1, Man Jae Her1, Youngjae Jeong2
1Department of Robotics and Mechatronics Engineering, Daegu Gyeongbuk Institute of Science and Technology (DGIST), Daegu, 42988, Republic of Korea.
Microsystems & Nanoengineering
|August 29, 2024
Summary
We developed a tunable Fabry-Pérot cavity using microelectromechanical systems (MEMS) for optoelectronics. This tunable cavity offers efficient tuning with fast response times and low power consumption.
Area of Science:
- Optoelectronics
- Photonics
- Microelectromechanical Systems (MEMS)
Background:
- Fabry-Pérot interferometers are key components in optical systems like lasers and sensors.
- Existing tunable cavities often face challenges in efficiency, scalability, and power consumption.
Purpose of the Study:
- To demonstrate a novel tunable Fabry-Pérot cavity.
- To integrate tunable Sagnac loop reflectors (SLRs) and phase shifters using electrostatic MEMS actuators.
Main Methods:
- Fabrication compatible with standard wafer-level silicon photonics processes.
- Utilized electrostatic MEMS actuators for tunable SLRs and phase shifters.
- Characterized reflectivity, phase shifting, response time, and power consumption.
Main Results:
- Achieved continuously tunable SLRs with an extinction ratio > 20 dB.
- Demonstrated full 2π phase shifting.
- Response times were < 25 μs, with static power < 20 fW and tuning energy < 20 pJ.
Conclusions:
- The developed MEMS-based tunable Fabry-Pérot cavity offers efficient, scalable, and low-power tuning.
- This technology is suitable for advanced optoelectronic applications such as sensors, lasers, and filters.
