Effects of In-Air Post Deposition Annealing Process on the Oxygen Vacancy Content in Sputtered GDC Thin Films Probed

Nunzia Coppola1, Sami Ur Rehman2, Giovanni Carapella3

  • 1Dipartimento di Ingegneria Industriale-DIIN, Università Degli Studi di Salerno and CNR-SPIN, 84084 Fisciano, SA, Italy.

ACS Applied Electronic Materials
|October 28, 2024
PubMed

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