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A Short-Pulse Indirect ToF Imager Using Six-Tap Pixel with a Backside-Illuminated Structure for High-Speed

Tomohiro Okuyama1, Haruya Sugimura2, Gabriel Alcade2

  • 1Graduate School of Medical Photonics, Shizuoka University, Hamamatsu 432-8011, Japan.

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|December 31, 2025
PubMed
Summary
This summary is machine-generated.

Backside illumination (BSI) structures significantly improve short-pulse indirect time-of-flight (SP-iToF) sensors. BSI pixels offer faster response times and higher demodulation contrast for enhanced depth sensing performance.

Keywords:
BSIdemodulation contrastdepth sensingiToFshort pulse

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Area of Science:

  • Optoelectronics and Sensor Technology
  • Photonics and Light Detection

Background:

  • Time-of-flight (ToF) sensors are crucial for depth perception.
  • Traditional front-side illumination (FSI) sensors face limitations in performance, especially with short pulses.
  • Advancements in pixel design are needed to enhance sensor speed and accuracy.

Purpose of the Study:

  • To evaluate the effectiveness of backside illumination (BSI) in 6-tap short-pulse indirect time-of-flight (SP-iToF) sensors.
  • To compare the performance of BSI pixels against front-side illumination (FSI) pixels.
  • To quantify the improvements in response time and demodulation contrast.

Main Methods:

  • Fabrication of 6-tap SP-iToF pixels using both FSI and BSI structures.
  • Impulse response measurements using near-infrared (NIR) light at 850 nm.
  • Demodulation contrast (DC) measurements with varying gating pulse widths (PW).

Main Results:

  • BSI pixels exhibited approximately half the time constants (0.35 ns peak, 0.93 ns tail) compared to FSI pixels.
  • BSI pixels achieved higher DC (99.5% at 10 ns PW, 95.3% at 3 ns PW) than FSI pixels (97.0% at 10 ns PW, 80.0% at 3 ns PW).
  • The thinner substrate in BSI sensors is identified as the primary cause for performance enhancement.

Conclusions:

  • BSI structures offer significant advantages for SP-iToF sensors, leading to faster optical response.
  • The enhanced demodulation contrast of BSI pixels ensures higher accuracy across different gating pulse widths.
  • The developed 6-tap ToF sensor demonstrates excellent depth linearity and resolution for indoor applications.