A Comparative Analysis of Lead-Free Piezoelectric Micromachined Ultrasonic Transducers for Powered Bio-Sensing

To exploit ultra-low power logic and architectural design techniques for bio-sensors in the human body, wireless ultrasonic techniques have emerged as a strong candidate for intra-body power transmission, thanks to lower medium attenuation and higher permitted safe intensity levels. When sub-100 μm dimensions are considered for the bio-sensor, most devices struggle to guarantee a suitable voltage and power for digital electronics due to additional scaling requirements. This study investigates three alternative piezoelectric micromachined ultrasonic transducers in aluminum nitride doped with scandium, as reported in the literature, operating in the range 1-10 MHz. Their respective advantages and limitations with regard to energy harvesting and signal transmission performance are analyzed. It is shown that devices with footprints of less than 100 × 100 μm² can achieve voltage outputs of over 150 mV and average power greater than 100 nW.