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Applied Spectroscopy
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May 15, 2018
Evaluation of Silicon Wafer-Based Internal Reflection Elements for Use with in Situ Fourier Transform Infrared (FT-IR) Spectroscopy
Brent A Sperling, Berc Kalanyan
Journal of Vacuum Science and Technology. B, Nanotechnology & Microelectronics : Materials, Processing, Measurement, & Phenomena : JVST B
|
March 5, 2020
Experiment-based modelling of a vapor draw ampoule used for low-volatility precursors
Brent A Sperling, James E Maslar
Applied Spectroscopy
|
March 28, 2012
Quantum cascade laser-based measurement of metal alkylamide density during atomic layer deposition
James E Maslar, William A Kimes, Brent A Sperling
Journal of Research of the National Institute of Standards and Technology
|
December 8, 2021
Apparatus for Characterizing Gas-Phase Chemical Precursor Delivery for Thin Film Deposition Processes
James E Maslar, William A Kimes, Brent A Sperling
Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films : an Official Journal of the American Vacuum Society
|
March 20, 2020
<i>In situ</i> infrared spectroscopy during La<sub>2</sub>O<sub>3</sub> ALD using La( <sup><i>i</i></sup> PrCp)<sub>3</sub> and H<sub>2</sub>O
Brent A Sperling, James E Maslar, Sergei V Ivanov
Journal of Electronic Materials
|
December 19, 2024
Band Offset and Electron Affinity of Monolayer MoSe<sub>2</sub> by Internal Photoemission
Qin Zhang, Siyuan Zhang, Brent A Sperling, et al.
Applied Spectroscopy
|
February 10, 2015
Measurements of metal alkylamide density during atomic layer deposition using a mid-infrared light-emitting diode (LED) source
James E Maslar, John Hoang, William A Kimes, et al.
Applied Spectroscopy
|
September 27, 2013
Time-resolved surface infrared spectroscopy during atomic layer deposition
Brent A Sperling, John Hoang, William A Kimes, et al.
Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films : an Official Journal of the American Vacuum Society
|
July 10, 2024
Characterization of bubbler performance for low-volatility liquid precursor delivery
James E Maslar, William A Kimes, Brent A Sperling, et al.
Applied Spectroscopy
|
July 15, 2017
Nondispersive Infrared Gas Analyzer for Vapor Density Measurements of a Carbonyl-Containing Organometallic Cobalt Precursor
James E Maslar, William A Kimes, Brent A Sperling, et al.
Page
of 2
Search research articles
Search
Showing results (1-10 of 15) with videos related to
Sort By:
Page
of 2
Applied Spectroscopy
|
May 15, 2018
Evaluation of Silicon Wafer-Based Internal Reflection Elements for Use with in Situ Fourier Transform Infrared (FT-IR) Spectroscopy
Brent A Sperling, Berc Kalanyan
Journal of Vacuum Science and Technology. B, Nanotechnology & Microelectronics : Materials, Processing, Measurement, & Phenomena : JVST B
|
March 5, 2020
Experiment-based modelling of a vapor draw ampoule used for low-volatility precursors
Brent A Sperling, James E Maslar
Applied Spectroscopy
|
March 28, 2012
Quantum cascade laser-based measurement of metal alkylamide density during atomic layer deposition
James E Maslar, William A Kimes, Brent A Sperling
Journal of Research of the National Institute of Standards and Technology
|
December 8, 2021
Apparatus for Characterizing Gas-Phase Chemical Precursor Delivery for Thin Film Deposition Processes
James E Maslar, William A Kimes, Brent A Sperling
Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films : an Official Journal of the American Vacuum Society
|
March 20, 2020
<i>In situ</i> infrared spectroscopy during La<sub>2</sub>O<sub>3</sub> ALD using La( <sup><i>i</i></sup> PrCp)<sub>3</sub> and H<sub>2</sub>O
Brent A Sperling, James E Maslar, Sergei V Ivanov
Journal of Electronic Materials
|
December 19, 2024
Band Offset and Electron Affinity of Monolayer MoSe<sub>2</sub> by Internal Photoemission
Qin Zhang, Siyuan Zhang, Brent A Sperling, et al.
Applied Spectroscopy
|
February 10, 2015
Measurements of metal alkylamide density during atomic layer deposition using a mid-infrared light-emitting diode (LED) source
James E Maslar, John Hoang, William A Kimes, et al.
Applied Spectroscopy
|
September 27, 2013
Time-resolved surface infrared spectroscopy during atomic layer deposition
Brent A Sperling, John Hoang, William A Kimes, et al.
Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films : an Official Journal of the American Vacuum Society
|
July 10, 2024
Characterization of bubbler performance for low-volatility liquid precursor delivery
James E Maslar, William A Kimes, Brent A Sperling, et al.
Applied Spectroscopy
|
July 15, 2017
Nondispersive Infrared Gas Analyzer for Vapor Density Measurements of a Carbonyl-Containing Organometallic Cobalt Precursor
James E Maslar, William A Kimes, Brent A Sperling, et al.
Page
of 2