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Xiuguo Chen

Showing results (11-20 of 47) with videos related to

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Optics Express|June 11, 2024
Inverse optical scatterometry using sketch-guided deep learningShuo Liu, Xiuguo Chen, Tianjuan Yang, et al.
Journal of the Optical Society of America. A, Optics, Image Science, and Vision|December 15, 2017
Reduced-basis boundary element method for fast electromagnetic field computationYating Shi, Xiuguo Chen, Yinyin Tan, et al.
Optics Letters|June 15, 2019
Wide field-of-view angle linear retarder with an ultra-flat retardance responseHonggang Gu, Xiuguo Chen, Hao Jiang, et al.
Optics Express|July 21, 2015
Mueller matrix imaging ellipsometry for nanostructure metrologyShiyuan Liu, Weichao Du, Xiuguo Chen, et al.
Optics Express|April 26, 2017
Robust overlay metrology with differential Mueller matrix calculusXiuguo Chen, Honggang Gu, Hao Jiang, et al.
Optics Letters|February 14, 2015
Improved deep-etched multilayer grating reconstruction by considering etching anisotropy and abnormal errors in optical scatterometryJinlong Zhu, Shiyuan Liu, Hao Jiang, et al.
Optics Express|October 19, 2017
Optimal polarization modulation for orthogonal two-axis Lloyd's mirror interference lithographyXiuguo Chen, Zongwei Ren, Yuki Shimizu, et al.
Optics Express|October 19, 2017
Self-calibration of Fizeau interferometer and planar scale gratings in Littrow setupXiuguo Chen, Yuki Shimizu, Xin Xiong, et al.
Applied Optics|July 14, 2016
Accurate alignment of optical axes of a biplate using a spectroscopic Mueller matrix ellipsometerHonggang Gu, Xiuguo Chen, Hao Jiang, et al.
The Review of Scientific Instruments|August 3, 2018
Development of a tomographic Mueller-matrix scatterometer for nanostructure metrologyYinyin Tan, Chao Chen, Xiuguo Chen, et al.
Pageof 5

Showing results (11-20 of 47) with videos related to

Sort By:
Pageof 5
Optics Express|June 11, 2024
Inverse optical scatterometry using sketch-guided deep learningShuo Liu, Xiuguo Chen, Tianjuan Yang, et al.
Journal of the Optical Society of America. A, Optics, Image Science, and Vision|December 15, 2017
Reduced-basis boundary element method for fast electromagnetic field computationYating Shi, Xiuguo Chen, Yinyin Tan, et al.
Optics Letters|June 15, 2019
Wide field-of-view angle linear retarder with an ultra-flat retardance responseHonggang Gu, Xiuguo Chen, Hao Jiang, et al.
Optics Express|July 21, 2015
Mueller matrix imaging ellipsometry for nanostructure metrologyShiyuan Liu, Weichao Du, Xiuguo Chen, et al.
Optics Express|April 26, 2017
Robust overlay metrology with differential Mueller matrix calculusXiuguo Chen, Honggang Gu, Hao Jiang, et al.
Optics Letters|February 14, 2015
Improved deep-etched multilayer grating reconstruction by considering etching anisotropy and abnormal errors in optical scatterometryJinlong Zhu, Shiyuan Liu, Hao Jiang, et al.
Optics Express|October 19, 2017
Optimal polarization modulation for orthogonal two-axis Lloyd's mirror interference lithographyXiuguo Chen, Zongwei Ren, Yuki Shimizu, et al.
Optics Express|October 19, 2017
Self-calibration of Fizeau interferometer and planar scale gratings in Littrow setupXiuguo Chen, Yuki Shimizu, Xin Xiong, et al.
Applied Optics|July 14, 2016
Accurate alignment of optical axes of a biplate using a spectroscopic Mueller matrix ellipsometerHonggang Gu, Xiuguo Chen, Hao Jiang, et al.
The Review of Scientific Instruments|August 3, 2018
Development of a tomographic Mueller-matrix scatterometer for nanostructure metrologyYinyin Tan, Chao Chen, Xiuguo Chen, et al.
Pageof 5