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Preparation of Silicon Nanowire Field-effect Transistor for Chemical and Biosensing Applications
Published on: April 21, 2016
TaSi2 nanowires: A potential field emitter and interconnect
Yu-Lun Chueh1, Mong-Tzong Ko, Li-Jen Chou
1Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu, Taiwan, Republic of China.
Tantalum silicide (TaSi2) nanowires were synthesized on silicon substrates. These metallic nanowires exhibit excellent electrical properties, showing promise for nanoelectronic and nano-optoelectronic applications.
Area of Science:
- Materials Science
- Nanotechnology
- Solid State Physics
Background:
- Tantalum silicide (TaSi2) is a metallic compound with potential applications in electronics.
- Efficient synthesis methods for TaSi2 nanowires are crucial for their integration into devices.
Purpose of the Study:
- To synthesize TaSi2 nanowires on a silicon substrate.
- To investigate the field-emission properties and electrical characteristics of the synthesized nanowires.
- To explore the effects of annealing parameters on nanowire growth.
Main Methods:
- Synthesis of TaSi2 nanowires by annealing NiSi2 films in a tantalum vapor environment at 950°C.
- Characterization of nanowire length and field-emission properties using specialized equipment.
- Analysis of annealing temperature effects and the role of a metal silicide mediation layer.
Main Results:
- TaSi2 nanowires up to 13 micrometers in length were successfully grown.
- Low turn-on field (4-4.5 V/microm) and threshold field (6 V/microm) were observed.
- A high field enhancement factor of 1800 and a high failure current density (3 x 10^8 A cm^-2) were achieved.
Conclusions:
- A simple and effective method for synthesizing TaSi2 nanowires was developed.
- The synthesized TaSi2 nanowires possess excellent electrical and field-emission properties.
- This approach holds significant potential for future applications in nanoelectronics and nano-optoelectronics.
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