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Fabrication, characterization and simulation of Ω-gate twin poly-Si FinFET nonvolatile memory

Mu-Shih Yeh1, Yung-Chun Wu, Min-Feng Hung

  • 1Department of Engineering and System Science, National Tsing Hua University, 101, Section 2 Kuang Fu Road, Hsinchu, 30013, Taiwan. ycwu@ess.nthu.edu.tw.

Nanoscale Research Letters
|July 24, 2013
PubMed

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