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Probing and analyzing buried interfaces of multifunctional oxides using a secondary electron energy analyzer
Avinash Srinivasan1, Anjam Khursheed1
1Department of Electrical and Computer Engineering,Centre for Integrated Circuit Failure Analysis and Reliability (CICFAR),National University of Singapore,Singapore117581.
Abstract:
A contactless method of probing and analyzing multifunctional oxide interfaces using an electron energy analyzer inside a scanning electron microscope is presented. High contrast experimental secondary electron analyzer signals are used to detect changes in the interface conductivity of a LaAlO3/SrTiO3 sample. Monte Carlo simulations of the primary beam/specimen interaction are carried out and correlated with the experimental results in order to help understand the role of the primary beam energy and adjust it to enhance contrast.
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