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Studies of Ion Kinetic-Energy Distributions in the Gaseous Electronics Conference RF Reference Cell

J K Olthoff1, R J Van Brunt1, S B Radovanov1

  • 1National Institute of Standards and Technology, Gaithersburg, MD 20899-0001.

Journal of Research of the National Institute of Standards and Technology
|November 21, 2017
PubMed

Keywords:
argon-oxygen plasmasion bombardmention energy analyzersion kinetic-energy distributionsmass spectrometryradio-frequency discharges

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