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Updated: Jan 31, 2026

Fabrication And Characterization Of Photonic Crystal Slow Light Waveguides And Cavities
Published on: November 30, 2012
Buried Rib SiO2 Multimode Interference Waveguides for Optofluidic Multiplexing
Matthew A Stott1, Vahid Ganjalizadeh2, Gopikrishnan Meena2
1Department of Electrical and Computer Engineering, Brigham Young University, Provo, UT 84602 USA.
Abstract:
Multimode interference (MMI) waveguides can be used to create wavelength-dependent spot patterns which enables simultaneous analyte detection on a single optofluidic chip, useful for disease diagnostics. The fidelity of such multi-spot patterns is important for high sensitivity and accurate target identification. Buried rib structures have been incorporated into these SiO2-based waveguides to improve environmental stability. Through experiments and simulation, this letter explores design parameters for a buried MMI rib waveguide based on anti-resonant reflecting optical waveguides in order to produce high-fidelity spot patterns. Optimal rib heights and widths are reported in the context of available microfabrication etch technology and performance for an optimized biosensor is shown.
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