Electron beam-induced current imaging with two-angstrom resolution

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Matthew Mecklenburg1, William A Hubbard2, Jared J Lodico2

  • 1Core Center of Excellence in Nano Imaging (CNI), University of Southern California, Los Angeles, California, 90089, U.S.A.

Ultramicroscopy
|November 4, 2019
PubMed

Keywords:
Aberration-correctionEBICSTEMSecondary electronsTransmission electron microscopy

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